Purifier UHP FSM1/4 SS316L Corrosives Max. Inlet 250PSIG Max. Flow 4,5 SLPM

Name: Purifier UHP FSM1/4 SS316L Corrosives Max. Inlet 250PSIG Max. Flow 4,5 SLPM
SKU: 31395440
Availability: InStock

物料号 31395440

Purifier UHP FSM1/4 SS316L Corrosives Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料号 31395440

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描述

MicroTorr purifiers are the most complete and reliable solution for point-of-use (POU) gas purification. These purifiers give an uncompromising consistency in the quality of your process, provide a low pressure drop and guarantee a long life.

一般信息

Applicaties

Weld gas/purge gas

Pharmaceutical production

Semiconductor process equipment

Analytical equipment

Annealing cover gas

LED manufacturing

Flat panel display production

Solar and energy

Other emerging technologies

Downloads

Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB

Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB

Applicaties

Weld gas/purge gas

Pharmaceutical production

Semiconductor process equipment

Analytical equipment

Annealing cover gas

LED manufacturing

Flat panel display production

Solar and energy

Other emerging technologies

Downloads

Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB

Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB

技术规格

Article

31395440

Header [Brand]

Purifier UHP

Description

Purifier UHP FSM1/4 SS316L Corrosives Max. Inlet 250PSIG Max. Flow 4,5 SLPM

Packaging specification

Cleaned and double-packed

Manufacturer

Mott

Manufacturer code

050T-V04-COR-CR-TA

Vessel construction (material)

SS 316L

Gas(es) purified

BCl₃
BF₃
Cl₂
ClF₃
F₂
HBr
HCl
HF
NF₃
SF₄
WF₆

Impurities removed

H₂O

Particle filtration

0,0015 μm

Inlet particle filtration

1 µm

Outlet purity

< 100 PPT

Regenerable

Maximum Pressure Drop

<2 psid

Max. operating pressure

17,24 Bar

Leak rating

10^-9 mbar · l/s

Max. temperature

Max. 50 °C

Maximum Flow

4,5 SLPM

Average Flow

0,3 SLPM

Polishing

Electropolishing

Surface finish

<10 µm Ra

增值税常规税率

21%

尺寸

Face Seal male 1/4

Ø D

25,4 mm

84,0 mm

备注

Remarks

Optional: 0.003 µm filtration
inlet/outlet fittings and valves
Sub-micron particle filtration
Face-to-face matching